Adhesion strength of lead zirconate titanate sol-gel thin films
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چکیده
منابع مشابه
Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films
Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
متن کاملThermal strain measurement in sol-gel lead zirconate titanate thin films
A fluorescence-based digital image correlation !DIC" technique is used to characterize the in-plane strain development of blanket sol-gel derived lead zirconate titanate thin films deposited on platinized silicon substrates. The in-plane strain is also measured within film line features patterned via a mediated octadecyltrichlorosilane !ODS" monolayer. The results indicate that the selective fi...
متن کاملResidual stress effects on piezoelectric response of sol-gel derived lead zirconate titatnate thin films
Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
متن کاملEffects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films
Lead zirconate titanate ~PZT! thin films with a Zr/Ti ratio of 52/48 were deposited on platinized silicon substrates by a sol-gel method and crystallized with preferred ~111! or ~100! orientation. Both the piezoelectric properties (d33) and the field-induced strains of the films with different thickness and preferred orientation were measured by a laser Doppler heterodyne interferometer. The we...
متن کاملMeasurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer
s of 2007 Conference on Implantable Auditory Prostheses, July 15–20,
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2016
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2015.12.014